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半導体電気特性評価装置 / Semiconductor electrical measurement systems

KEITHLEY 236A (source measure unit), KEITHLEY 590 (CV analyzer), KEITHLEY 2400 (source meter)
KEITHLEY 595 (quasistatic CV meter), KEITHLEY 6512 (programable electrometer)
KEITHLEY 220 (programable current source), KEITHLEY 2000 (multimeter), SANWA MI-494 (HF C-V/I-V)
ADCMT 6156 (DC voltage current source), PICOTEST (M3500A multimeter)

試料温度: 室温
1台のPCから制御可能
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