Functional Device Engineering Laboratory / Kyushu University
3F Evaluation Room PR-32/33
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Evaluation and Analysis Systems
DLTS (Deep Level Transient Spectroscopy)
Impedance Analyzer
Atomic Force Microscope (AFM)
Hall effect measurement system
Semiconductor Electronic Measurement Systems
Thin film thickness measurement system
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LANGUAGE
Japanese
English
GIC Bldg.
cleanroom 1
equipment room 1
evaluation room PR-32/33