NanoFactory Research Platform

Prof. Yuichi Harada

Prof. Yuichi Harada

NanoFactory is the first research platform in KOINE project division and it is aimed to establish nanofabrication technologies and its various applications, which can provide us to reveal behaviors and phenomena of materials in nano-scale.

In KOINE project division, we promote KOINE concept for many research fields to create innovative idea and explore feasibility for industrial or social reform.


Project name:

Establishment of Nano-Scale 3D Fabrication technology

Project leader:

Divisional Director / Prof. Yuichi Harada

1F, GIC Bldg., Chikushi Campus
PHONE: +81-92-583-7873

Conformal surface coating by atomic layer deposition technique and its applications.

Atomic layer deposition (ALD) is the technique to grow a single atomic layer digitally due to the self-terminating growth mechanism. ALD technique gives dense thin film without pin holes at rather low growth temperature and the thin film covers whole surface of the object conformally. Due to this features, ALD coating can be applicable not only for semiconductor materials, but also for plastic and even living matters, which gives various potential applications for unexplored industrial fields. Currently insulating materials are mainly used, however we succeeded to grow metallic materials such as aluminum. Furthermore ferroelectric and magnetic materials can be grown as well.

ALD technology as well as its various applications in NanoFactory research platform are stored in the knowledge base, which can be applicable for many different industrial and research purposes.

See the published various papers on ALD technology as shown below:

Promotion of KOINE research platforms

KOINE is the abbreviation of Kyudai global Open Innovation Network Engine, but it is also an English word to represents common language originated from ancient Greek. KOINE meeting provides the opportunities to meet up and discuss freely with people who have different backgrounds. Such discussion eventually brings us brilliant idea and can explore innovative industrial applications.

Bring us industrial or social complicated problems and we discuss and explore such problems in many different points of views.

Al2O3 film coating on an etched silicon substrate./Superconducting Al film on a Si substrate./Al2O3 film deposition onto graphene by standard ALD technique./Homogenious Al2O3 film deposition onto graphene by two-step ALD technique.
KOINE Vision
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